JPH0621244Y2 - ウェハ把持装置 - Google Patents

ウェハ把持装置

Info

Publication number
JPH0621244Y2
JPH0621244Y2 JP10135186U JP10135186U JPH0621244Y2 JP H0621244 Y2 JPH0621244 Y2 JP H0621244Y2 JP 10135186 U JP10135186 U JP 10135186U JP 10135186 U JP10135186 U JP 10135186U JP H0621244 Y2 JPH0621244 Y2 JP H0621244Y2
Authority
JP
Japan
Prior art keywords
wafer
roller
support
supporting
gripping device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10135186U
Other languages
English (en)
Japanese (ja)
Other versions
JPS636738U (en]
Inventor
亘 大加瀬
寛治 小沢
Original Assignee
東京エレクトロン東北株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン東北株式会社 filed Critical 東京エレクトロン東北株式会社
Priority to JP10135186U priority Critical patent/JPH0621244Y2/ja
Publication of JPS636738U publication Critical patent/JPS636738U/ja
Application granted granted Critical
Publication of JPH0621244Y2 publication Critical patent/JPH0621244Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP10135186U 1986-07-01 1986-07-01 ウェハ把持装置 Expired - Lifetime JPH0621244Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10135186U JPH0621244Y2 (ja) 1986-07-01 1986-07-01 ウェハ把持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10135186U JPH0621244Y2 (ja) 1986-07-01 1986-07-01 ウェハ把持装置

Publications (2)

Publication Number Publication Date
JPS636738U JPS636738U (en]) 1988-01-18
JPH0621244Y2 true JPH0621244Y2 (ja) 1994-06-01

Family

ID=30972008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10135186U Expired - Lifetime JPH0621244Y2 (ja) 1986-07-01 1986-07-01 ウェハ把持装置

Country Status (1)

Country Link
JP (1) JPH0621244Y2 (en])

Also Published As

Publication number Publication date
JPS636738U (en]) 1988-01-18

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